Control Performances of a Fine Motion Stage using a Multilayer Electrostatic Actuator without Precise Balls for Lubrication
This paper describes the control performances of a multilayer electrostatic actuator, which is designed for a fine motion stage without precise balls for lubrication. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which cons...
Saved in:
Main Author: | Md Ghazaly, Mariam |
---|---|
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2010
|
Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/8970/1/ICMT2010_05.pdf http://eprints.utem.edu.my/id/eprint/8970/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication
by: Md Ghazaly, Mariam
Published: (2011) -
Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
by: Md Ghazaly, Mariam
Published: (2012) -
Basic characteristics of a multilayer thin electrostatic actuator supported by
lubricating oil for a fine-motion stage
by: Md Ghazaly, Mariam
Published: (2012) -
Open-loop Characteristics of a Multilayer Electrostatic Actuator for a Fine Motion Stage
by: Md Ghazaly, Mariam
Published: (2010) -
Characteristic switching of a multilayer thin electrostatic actuator by a driving signal for an ultra-precision motion stage
by: Md Ghazaly, Mariam, et al.
Published: (2013)