Design of Electrostatic Comb Actuators based on Finite Element Method

• Main Authors: Mon, Thet Thet, Z., Ghazalli, Asnul Hadi, Ahmad, Mohd Fazli, Ismail, Khairul Fikri, Muhammad
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2010
• Subjects: T Technology (General); TJ Mechanical engineering and machinery
• Online Access: http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf; http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf; http://umpir.ump.edu.my/id/eprint/10463/; http://dx.doi.org/10.1109/ESCINANO.2010.5700957

Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the ele...