Control Performances of a Fine Motion Stage using a Multilayer Electrostatic Actuator without Precise Balls for Lubrication

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8970/1/ICMT2010_05.pdf; http://eprints.utem.edu.my/id/eprint/8970/

This paper describes the control performances of a multilayer electrostatic actuator, which is designed for a fine motion stage without precise balls for lubrication. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which cons...