Characteristic switching of a multilayer thin electrostatic actuator by a driving signal for an ultra-precision motion stage

• Main Authors: Md Ghazaly, Mariam, Sato, Kaiji
• Format: Article
• Language: English
• Published: Elsevier 2013
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/6452/1/journal_2013.pdf; http://eprints.utem.edu.my/id/eprint/6452/; http://www.sciencedirect.com/science/article/pii/S0141635912001201

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. Friction forces often deteriorate the response and positioning accuracy of a control system. How...