Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2012
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Online Access: | http://eprints.utem.edu.my/id/eprint/10984/1/JSME_AUTUMN_MEETING2012.pdf http://eprints.utem.edu.my/id/eprint/10984/ |
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