Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8972/1/ICOMM-2011.pdf; http://eprints.utem.edu.my/id/eprint/8972/

This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precis...