Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor

• Main Authors: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• Format: Conference or Workshop Item
• Published: 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://ieeexplore.ieee.org; http://eprints.utp.edu.my/6969/

This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with qual...