Mechanical behavior of an electrostatically actuated micropump

We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the e...

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Bibliographic Details
Main Authors: Faris, Waleed Fekry, Abdel-Rahman, Eihab M., Nayfeh, Ali H.
Format: Conference or Workshop Item
Language:English
Published: 2002
Subjects:
Online Access:http://irep.iium.edu.my/49864/3/49864-new.pdf
http://irep.iium.edu.my/49864/
http://dx.doi.org/10.2514/6.2002-1303
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