Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
The present paper describes Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid.
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| Main Author: | |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/10993/1/UTeM_Mariam_E-PRINT.pdf http://eprints.utem.edu.my/id/eprint/10993/ |
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