Open-loop Characteristics of a Multilayer Electrostatic Actuator for a Fine Motion Stage

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8963/1/ID-ICMT50.pdf; http://eprints.utem.edu.my/id/eprint/8963/

This paper outlines the open-loop characteristics of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to envisage a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficien...