The Evaluation of a Locking Function For a Vertical Stage Electrostatic Actuator

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2014
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/13537/1/paper_10033.pdf; http://eprints.utem.edu.my/id/eprint/13537/

The present paper validates the effectiveness of the characteristic switching as a locking function for a vertical motion multilayer thin electrostatic actuator supported by only lubricating oil. In the electrostatic actuator, the friction forces often deteriorate the response and positioning accura...