Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
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| Main Author: | |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/10988/1/JSME_AUTUMN_MEETING.pdf http://eprints.utem.edu.my/id/eprint/10988/ |
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