Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
Online Access:http://eprints.utem.edu.my/id/eprint/10988/1/JSME_AUTUMN_MEETING.pdf
http://eprints.utem.edu.my/id/eprint/10988/
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