Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning

• Main Author: Md Ghazaly , Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2012
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8978/1/%5B1%5D_ASPE2012.pdf; http://eprints.utem.edu.my/id/eprint/8978/; http://aspe.net/technical-meetings/past-aspe-meetings/2012-summer-topical-meeting/

Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges...