Characteristic switching of a multilayer thin electrostatic actuator by a driving signal for an ultra-precision motion stage
The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. Friction forces often deteriorate the response and positioning accuracy of a control system. How...
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Main Authors: | Md Ghazaly, Mariam, Sato, Kaiji |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2013
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/6452/1/journal_2013.pdf http://eprints.utem.edu.my/id/eprint/6452/ http://www.sciencedirect.com/science/article/pii/S0141635912001201 |
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