Holdings: Vertical electrostatic comb drive actuator for MEMS design

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Bibliographic Details
Main Author:	Wan Mokhdzani Wan Nor Haimi
Other Authors:	Hafiz Ismail (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Microelectromechanical systems > Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/2004
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