Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage

The present paper describes the basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil rather than precise ball bearings for a fine-motion stage. The purpose of the present research is to realize an easy-to-maintain multilayer thin electrostatic actuator havi...

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Article
Language:English
Published: Elsevier 2012
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Online Access:http://eprints.utem.edu.my/id/eprint/6453/1/1st_Journal_PE.pdf
http://eprints.utem.edu.my/id/eprint/6453/
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