Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach
CMOS-MEMS resonators are the key parts of modern integrated systems. Most of these resonators are fabricated through CMOS composite layers that are sensitive to temperature. In this article, the effects of temperature on the collective Young's moduli and quality factor of CMOS composite layers...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Elsevier Ltd
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84958861595&doi=10.1016%2fj.microrel.2015.12.003&partnerID=40&md5=1290e8303872f4136336dbb341119b70 http://eprints.utp.edu.my/25571/ |
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