Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing
In this paper, a CMOS-MEMS resonator is fabricated with embedded micro-heater and temperature sensor for application in the detection of ammonia in exhaled breath. The resonator is fabricated using commercial 0.35 μm CMOS technology. An aluminium micro-heater and temperature sensor is used to contr...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Research India Publications
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf http://eprints.utp.edu.my/25595/ |
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