Design and modeling of a CMOS MEMS gravimetric sensor

• Main Authors: Abdalrahman, M.G., Dennis, J.O., Khir, M.H.M.
• Format: Article
• Published: 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f; http://eprints.utp.edu.my/28551/

Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequ...