Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications

• Main Authors: Mirza, A., Hamid, N.H., Khir, M.H.M., Dennis, J.O., Ashraf, K., Jan, M.T., Shoaib, M.
• Format: Conference or Workshop Item
• Published: 2013
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893577447&doi=10.1109%2fRSM.2013.6706475&partnerID=40&md5=932b8d4bb00e0312ac6e9d7442f73acc; http://eprints.utp.edu.my/32676/

Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their...