Influence of crack growths on the performances of cantilever based MEMS devices: Design and simulations

• Main Authors: Jan, M.T., Hamid, N.H.B., Md Khir, M.H.B., Shoaib, M., Mirza, A.
• Format: Conference or Workshop Item
• Published: IEEE Computer Society 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346410&doi=10.1109%2fICIAS.2014.6869508&partnerID=40&md5=ba257435d2bba46d4a2f19be29c03047; http://eprints.utp.edu.my/32114/

There is a great need to design experimental setup to deal with the fundamental material issues in MEMS. Cantilever being the active part of MEMS is modeled using COMSOL Multiphysics. The model is simulated for small cracks ranging from Nano to Micro-meter. The cracks are produced at the anchor of M...