A CMOS-MEMS cantilever sensor for capnometric applications

• Main Authors: Mirza, A., Hamid, N.H., Khir, M.H.M., Dennis, J.O., Ashraf, K., Shoaib, M., Jan, M.T.
• Format: Article
• Published: Institute of Electronics Information Communication Engineers 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469; http://eprints.utp.edu.my/31276/

Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for c...