CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling

• Main Authors: Mian, M.U., Dennis, J.O., Khir, M.H.M., Sutri, N.Y., Ahmed, A.Y., Tang, T.B.
• Format: Article
• Published: Institute of Electrical and Electronics Engineers Inc. 2017
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012034462&doi=10.1109%2fICIAS.2016.7824056&partnerID=40&md5=d071ae742f56f6167b13e3da635eb571; http://eprints.utp.edu.my/20230/

In this paper, we report a micro electro mechanical system (MEMS) shuttle resonator fabricated on CMOS-MEMS wafer technique. The resonator operates at the resonant frequency when a current flows through the metal layers in the presence of an external magnetic field. We investigate the resonant frequ...