Study of nonlinear pull-in voltage effects in electrostatic cantilever-based MEMS sensors

• Main Authors: Shoaib, M., Hamid, N.H.B., Ali, N.B.B.Z., Jan, M.T., Mirza, A.
• Format: Conference or Workshop Item
• Published: IEEE Computer Society 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906335963&doi=10.1109%2fICIAS.2014.6869509&partnerID=40&md5=760fef66f6ed798fc2ac29fb391671f4; http://eprints.utp.edu.my/32146/

This paper presents new investigations to improve dynamic behavior of electrostatic cantilever based MEMS sensors by reducing pull-in voltage nonlinearity. It is believe that pull-in voltage is one of the major factors to generate pull-in force that induces parasitic pull-in frequency as a result th...