Design, modelling and testing of CMOS-MEMS switch

• Main Authors: Ahmad, F., Amjad, W.A., Mehmood, F., Jan, M.T., Dennis, J.O., Khir, M.H.B.M.
• Format: Article
• Published: Springer Science and Business Media Deutschland GmbH 2021
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85105282330&doi=10.1007%2fs00542-021-05221-4&partnerID=40&md5=0d74311cb885adfa75c962c024449ccb; http://eprints.utp.edu.my/23847/

The Electro-Magnetic (EM) MEMS switches are playing an important role in our everyday life due to their high efficiency and system integrity. The design, modelling and testing of MEMS EM switch is presented in this research work. This chip-based MEMS switch is fabricated using 0.35 µm Complementar...