Modeling and simulation of polysilicon piezoresistors in a CMOS-MEMS resonator for mass detection

• Main Authors: Gafare, M., Khir, M.H.M., Rabih, A., Ahmed, A., Dennis, J.O.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963811379&doi=10.1109%2fRSM.2015.7354957&partnerID=40&md5=ea763e79eeded8040cad021e4666a13e; http://eprints.utp.edu.my/26182/

This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitu...