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Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach

CMOS-MEMS resonators are the key parts of modern integrated systems. Most of these resonators are fabricated through CMOS composite layers that are sensitive to temperature. In this article, the effects of temperature on the collective Young's moduli and quality factor of CMOS composite layers...

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Bibliographic Details
Main Authors: Jan, M.T., Ahmad, F., Hamid, N.H.B., Md Khir, M.H.B., Ashraf, K., Shoaib, M.
Format: Article
Published: Elsevier Ltd 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84958861595&doi=10.1016%2fj.microrel.2015.12.003&partnerID=40&md5=1290e8303872f4136336dbb341119b70
http://eprints.utp.edu.my/25571/
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84958861595&doi=10.1016%2fj.microrel.2015.12.003&partnerID=40&md5=1290e8303872f4136336dbb341119b70
http://eprints.utp.edu.my/25571/

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