CMOS-MEMS thermoelectric generator for low power medical devices

• Main Authors: Rahman, Z.H.A., Khir, M.H.Md., Burhanudin, Z.A.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963891910&doi=10.1109%2fRSM.2015.7354965&partnerID=40&md5=5c20bb2c310a670f50238bfc779c280d; http://eprints.utp.edu.my/30744/

This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that resu...