Characterization of MEMS comb capacitor
With the advancement of micro-electro-mechanical systems (MEMS) technologies, it is compulsory to have the sources which power the micro devices at micron scale. Due to the miniaturization, compactness, inexpensive and ease of integration with the standard process compatibility, CMOS-MEMS capacitor...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Springer
2020
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85074821029&doi=10.1007%2fs00542-019-04671-1&partnerID=40&md5=035e24e498e25b1f2e7bc2b77ba0a26f http://eprints.utp.edu.my/23238/ |
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