Design of CMOS-MEMS based thermoelectric generator

• Main Authors: Rahman, Z.H.A., Khir, M.H.M., Burhanudin, Z.A., Rahman, A.A.A., Jamil, W.A.W.
• Format: Conference or Workshop Item
• Published: 2013
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893593745&doi=10.1109%2fRSM.2013.6706460&partnerID=40&md5=2dd1967c536878fb5420c2ddaf12699a; http://eprints.utp.edu.my/32528/

This paper presents the design of micro-scale thermoelectric generator (TEG) using CMOS-MEMS technology. Electrical energy is obtained by means of thermal energy harvesting technique. Thermal energy harvesting has become a promising solution to power up low power system such as wireless sensor netwo...