Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

• Main Authors: Rabih, A.A.S., Dennis, J.O., Khir, M.H.Md., Ahmed, M.G.
• Format: Article
• Published: Institute of Electrical and Electronics Engineers Inc. 2017
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d; http://eprints.utp.edu.my/20171/

CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural fre...