The Evaluation of a Locking Function For a Vertical Stage Electrostatic Actuator
The present paper validates the effectiveness of the characteristic switching as a locking function for a vertical motion multilayer thin electrostatic actuator supported by only lubricating oil. In the electrostatic actuator, the friction forces often deteriorate the response and positioning accura...
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Main Author: | Md Ghazaly, Mariam |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/13537/1/paper_10033.pdf http://eprints.utem.edu.my/id/eprint/13537/ |
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