Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to optimi...
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Main Authors: | Yusof, Norliana, Bais, Badariah, Soin, Norhayati, Majlis, Burhanuddin Yeop |
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Format: | Conference or Workshop Item |
Published: |
2021
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Subjects: | |
Online Access: | http://eprints.um.edu.my/35449/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115099606&doi=10.1109%2fRSM52397.2021.9511599&partnerID=40&md5=6603dfa28bb3c5262f3efb4f94053c94 |
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