Electrical testing for MEMS's piezoresistive pressure sensor

Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM...

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Bibliographic Details
Main Authors: Abd Wahab, M.Z.B., Sauli, Z.B., Ahmad, I., Suradi, W.B.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5331
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