Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective p...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2014
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| Online Access: | http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf http://journalarticle.ukm.my/6860/ http://www.ukm.my/jsm |
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