Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching

• Main Authors: Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin
• Format: Article
• Language: English
• Published: Trans Tech Publications Ltd., Switzerland 2014
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/38849/1/applied_mechanics_and_materials.pdf; http://irep.iium.edu.my/38849/; http://www.scientific.net

In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and mac...