Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer

Undercutting is a common problem in wet anisotropic etching. This problem in turn, influences the performance and sensitivity of MEMS devices. This paper investigates the use of corner compensation to prevent convex corner undercutting in a MEMS piezoresistive accelerometer. The Intellisuite CAD sim...

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Bibliographic Details
Main Authors: Yusof, N., Soin, N., Noorakma, A.C.W.
Format: Article
Published: Penerbit UTM Press 2016
Subjects:
Online Access:http://eprints.um.edu.my/18741/
http://dx.doi.org/10.11113/jt.v78.4914
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