Design and modeling of silicon MEMS accelerometer

• Main Authors: Hrairi, Meftah, Baharom, Badrul Hanafi
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf; http://irep.iium.edu.my/2052/

In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...