Optimization of MEMS intraocular capacitive pressure sensor

• Main Authors: Norliana, Y., Che Wan Noorakma, A., Ali, M., Soin, N., Hatta, S.F.W.M
• Format: Conference or Workshop Item
• Language: English
• Published: 2016
• Subjects: T Technology (General); TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.unisza.edu.my/1091/1/FH03-FSTK-16-06893.jpg; http://eprints.unisza.edu.my/1091/

MEMS intraocular capacitive pressure sensor is used for monitoring glaucoma disease. The structure of the diaphragm of MEMS capacitive pressure sensor is one of the important factors which could affect the sensor's performance. In this paper, Taguchi and Two-Level Factorial approach are employe...