Fabrication of planar microcoils for LC-MEMS pressure sensor

• Main Authors: Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Muhamad Ramdzan, Buyong, Burhanuddin, Yeop
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2020
• Subjects: T Technology (General); TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.unisza.edu.my/1826/1/FH03-FRIT-20-42025.pdf; http://eprints.unisza.edu.my/1826/2/FH03-FRIT-20-42026.pdf; http://eprints.unisza.edu.my/1826/

This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphological...