Sensitivity and Q-Factor trade-off analysis of MEMS pressure sensor for bladder implants

• Main Authors: Norliana, Yusof, Badariah, Bais, Burhanuddin Yeop, Majlis, Norhayati, Soin
• Format: Conference or Workshop Item
• Language: English
• Published: 2018
• Subjects: T Technology (General); TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.unisza.edu.my/1264/1/FH03-FRIT-19-23912.pdf; http://eprints.unisza.edu.my/1264/

Ultra-small and highly sensitive MEMS bladder sensor has to be aligned with efficient wireless coupling to meet the requirements of minimally invasive implantation. In this study, finite element analysis (FEA) is conducted to investigate sensor's sensitivity and Q-factor on MEMS capacitive pr...