Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS

• Main Authors: Zakaria, Mohd Hazrul, Bais, Badariah, Ab. Rahim, Rosminazuin, Yeop Majlis, Burhanuddin
• Format: Conference or Workshop Item
• Language: English
• Published: 2012
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf; http://irep.iium.edu.my/38793/; http://ieeeexplore.com/xpl/articleDetails.jsp?tp=&arnumber=6417154&searchWithin%3Dp_Authors%3A.QT.Bais%2C+B..QT.

In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the micr...