A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

• Main Authors: Md Khir, Mohd Haris, Qu, Hongwei
• Format: Conference or Workshop Item
• Published: 2010
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf; http://eprints.utp.edu.my/3451/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. T...