Fabrication of dual- and single-layer piezoresistive microcantilever sensor

• Main Authors: Ab. Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin
• Format: Article
• Language: English; English
• Published: Asian Research Publishing Network (ARPN) 2015
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://irep.iium.edu.my/50730/1/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor.pdf; http://irep.iium.edu.my/50730/2/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor_SCOPUS.pdf; http://irep.iium.edu.my/50730/; http://www.arpnjournals.com/jeas/research_papers/rp_2015/jeas_0815_2401.pdf

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and s...