Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method

• Main Authors: Yusof, Norliana, Bais, Badariah, Soin, Norhayati, Majlis, Burhanuddin Yeop
• Format: Conference or Workshop Item
• Published: 2021
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/35449/; https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115099606&doi=10.1109%2fRSM52397.2021.9511599&partnerID=40&md5=6603dfa28bb3c5262f3efb4f94053c94

This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to optimi...