A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass

• Main Authors: Md Khir, Mohd Haris, Qu, Hongwei, Qu, Peng
• Format: Article
• Published: MDPI 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/7232/1/sensors-9549-publish.pdf; http://www.mdpi.com/journal/sensors/; http://eprints.utp.edu.my/7232/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge wa...