Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach

• Main Authors: Mohamad, Mazita, Soin, Norhayati, Ibrahim, Fatimah
• Format: Article
• Published: Springer Verlag 2018
• Subjects: R Medicine; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/21268/; https://doi.org/10.1007/s00542-017-3699-8

MEMS piezoresistive pressure sensors have been contemporarily used to measure intracranial pressure. Since an intracranial signal is of the pulsating type, the microsensor must be very sensitive to detect these changes. The sensitivity of the existing MEMS piezoresistive intracranial pressure sensor...