Optical band gap and surface morphology of AlN thin-film sputtered by HiPIMS on glass substrate

• Main Authors: Azman, Zulkifli, Nayan, Nafarizal, Othman, Nur Afiqah, Abu Bakar, Ahmad Shuhaimi, Mamat, Mohamad Hafiz, Mohd. Yusop, Mohd. Zamri, Ahmad, Muhammad Yazid
• Format: Conference or Workshop Item
• Published: 2023
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/108228/; http://dx.doi.org/10.1063/5.0124192

Aluminium Nitride (AlN) thin-film on glass substrate were prepared by HiPIMS at different Ar to N2 ratio. The XRD pattern revealed the amorphous structure of AlN as compared to AlN on Si substrate. The optical band gap of AlN on glass derived from Tauc plot shows the optical band gap was inversely p...