Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si

• Main Authors: Malik, A.F., Jeoti, V., Fawzy, M., Iqbal, A., Aslam, Z., Pandian, M.S., Marigo, E.
• Format: Article
• Published: Institute of Electrical and Electronics Engineers Inc. 2017
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85011977793&doi=10.1109%2fICIAS.2016.7824112&partnerID=40&md5=3bca6f73bd7313952b44a1171fec7dfd; http://eprints.utp.edu.my/20231/

In this study, the problem of estimating surface acoustic wave (SAW) velocity and coupling coefficient for multi-layered piezo-substrates is investigated in Aluminum Nitride/Silicon Dioxide/Silicon (AlN/SiO2/Si) using energy dissipation method. Assuming SAW energy lying within 10 times of wavelength...