Effect of discharge power on the properties of GaN thin films on AlN-(002) prepared by magnetron sputtering deposition

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Bibliographic Details
Main Authors: Muliana, Tahan, Nafarizal, Nayan, Siti Noraiza, Abd Razak, Anis Suhaili, Bakri, Zulkifli, Azman, Mohd Zainizan, Sahdan, Nur Amaliyana, Rahip, Ahmad Shuhaimi, Abu Bakar, Mohd Yazid, Ahmad
Other Authors: nafa@uthm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2020
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Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/67712
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